MVD APS talk - silicon

silicon strip and pad detectors

MVD strip detector mask This shows a 256-channel silicon strip detector layed out on a 4" wafer, surrounded by a number of small test structures.
The silicon is the standard 300 um thick. There are 256 200-um pitch strips (running vertically in this image).
MVD pad detector mask This shows a 12-column x 21-row silicon pad detector layed out on a 4" wafer, surrounded by a number of small test structures.
Te smallest pads are about 2x2mm, and the biggest pads about 5x5mm.
These detectors are made with a double-metal process. It allows readout traces to be deposited right over the pads, to bond pads along the top edge of the detector. Advantages of this technique are:
  • Eliminates specialized kapton cable
  • Reduces wirebonding
  • Facilitates detector probing
  • Makes assembly, handling easier
  • Increases yield
  • Sequential channel readout